Applying Multivariate Statistical Analysis to Atom Probe Tomography
نویسندگان
چکیده
منابع مشابه
Applying Multivariate Statistical Analysis to Atom Probe Tomography
Atom probe tomography (APT) is a powerful method for studying the microstructure and chemistry of materials at the unit-cell level [1]. Because APT produces datasets containing up to billions of atom identities, new methods of analysis are being developed to rapidly datamine information from the APT data. Spectrum imaging (SI) methods utilizing multivariate statistical analysis (MVSA) are becom...
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The application of spectrum imaging multivariate statistical analysis methods, specifically principal component analysis (PCA), to atom probe tomography (APT) data has been investigated. The mathematical method of analysis is described and the results for two example datasets are analyzed and presented. The first dataset is from the analysis of a PM 2000 Fe-Cr-Al-Ti steel containing two differe...
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Multivariate statistical analysis (MVSA) methods have been shown to yield many advantages in analytical instrumentation techniques because they offer an objective means to find complex information correlations in data that are not obvious to an observer and they maximize the discrimination of low-level signals from noise. Because they are objective in nature, the methods hold promise for automa...
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The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...
متن کاملPoint-by-point compositional analysis for atom probe tomography
This new alternate approach to data processing for analyses that traditionally employed grid-based counting methods is necessary because it removes a user-imposed coordinate system that not only limits an analysis but also may introduce errors. We have modified the widely used "binomial" analysis for APT data by replacing grid-based counting with coordinate-independent nearest neighbour identif...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2010
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927610056205